You can see details about command lines available by typing “procmon.exe /?” in command prompt or by clicking on Help menu in ProcMon GUI:

For instance, if you want to run ProcMon silently and save in realtime captured data into a file, use command below:

procmon.exe /AcceptEula /Quiet /Minimized /BackingFile “c:\test.pml”

Then, when you want to stop it, just run following command:

procmon.exe /Terminate

Kind Regards,
Witold Lawacz